INFICON Guardian EIES Controller - Manual (Page 45)

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Guardian Co-Deposition Controller Operating Manual
Guardian controllers with Gas Compensating sensors have additional Emission
and Leakage parameters for the gas sensor. A Gas Calibration factor is used to null
the gas effect from the main sensor readings. See
Figure 2-20 .
Figure 2-20 Gas Calibration Factor
See Sensor Tab on page 3-30 for a description of the Gas Cal parameter. For now,
uncheck Enable Gas Sensors if it is checked.
2.4.5 QCM Option
If you installed the optional SQM-242 card or Q-pod, click the QCM tab of the Edit
System dialog box.
Figure 2-21 QCM Tab