Figure 5-2, Maint – INFICON Guardian EIES Controller User Manual
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Guardian Co-Deposition Controller Operating Manual
Figure 5-2 New 016-Series Sensor Exploded
1
Unplug the in-vacuum cable from the Sensor connector pins by grasping the
connector body and pulling outward with a slight rocking motion.
2
If necessary, loosen the clamping ring at the end of the optical tube to remove
the Sensor from the vacuum system.
3
Carefully, pry the cover off the Sensor housing.
4
Remove the two #2-56 hex screws which hold the emitter assembly and name
plate in place.
5
Check the general mechanical condition of the assembly before you install the
new emitter assembly. remove excess evaporant and flaking, if necessary.
6
Install the new emitter such that the connector pins are centered in the housing
slot and the aperture plate is parallel with the Faraday collector.
Cover
Faraday Collector Assy.
Housing Assy.
Optical Tube
Emitter Assy.
Ref: #2-56 Hex Screws
016-201-G1