Figure 2-7 – INFICON Guardian EIES Controller User Manual

Page 34

Advertising
background image

2 - 10

IP

N 07

4-

51

7-

P1

D

Guardian Co-Deposition Controller Operating Manual

Figure 2-7 CoDep Option

A co-deposition film has been added to the first layer. Click Paste again to create
a three film co-deposition layer.

Now select the Below option and click Paste to add a second layer below layer 1.
Finally, select the CoDep option and click Paste to add a CoDep film to layer 2.
See

Figure 2-8

.

Figure 2-8 Pasting CoDep Layer

The CIGS process now consists of Layer1 and Layer2. Layer1 will co-deposit three
films, and Layer2 will co-deposit two films. However, the channel, output, and films
are all duplicates. We will correct that error in the next section.

Advertising