Figure 2-7 – INFICON Guardian EIES Controller User Manual
Page 34
Advertising
2 - 10
IP
N 07
4-
51
7-
P1
D
Guardian Co-Deposition Controller Operating Manual
Figure 2-7 CoDep Option
A co-deposition film has been added to the first layer. Click Paste again to create
a three film co-deposition layer.
Now select the Below option and click Paste to add a second layer below layer 1.
Finally, select the CoDep option and click Paste to add a CoDep film to layer 2.
See
Figure 2-8 Pasting CoDep Layer
The CIGS process now consists of Layer1 and Layer2. Layer1 will co-deposit three
films, and Layer2 will co-deposit two films. However, the channel, output, and films
are all duplicates. We will correct that error in the next section.
Advertising