INFICON Guardian EIES Controller User Manual
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Guardian Co-Deposition Controller Operating Manual
Query/Update Utility
@QU;<param1>
@UU;<param1>;<Param1>
02
Simulate Mode (0/1)
06
Front Panel Disable
Param 1 is sum of these disable values:
1 Start
Buttons 32 Zero
2
Emission 1
64
Manual Power
4
Emission 2
128
File Menu
8 DataLog
256
Edit
Menu
16 Chan
Edit
512 Graph
Setup
For example: <Param1> = 9 would disable Start Buttons and DataLog
07
Application Visible (0/1)
11
EIES Software Version (Query only)
12
EIES Computer Operating System (Query only)
13
EIES Computer Name (Query only)
14
EIES On Top (0/1, Update only)
Query Measurement
@QM;<param1>
1n
Channel n Power (n=1 to 8)
2n
Channel n Rate
3n
Channel n Thickness
4n
Channel n Deviation
5n
Sensor n Emission Current (mA), n = 1 to 4
1=Sens1, 2=Sens2, 3 = Gas1, 4=Gas2
5n
Sensor n Leakage Current (mA), n = 5 to 8
5=Sens1, 6=Sens2, 7 = Gas1, 8=Gas2
6n
Sensor n Power (watts), n = 1 to 4
1=Sens1, 2=Sens2, 3 = Gas1, 4=Gas2
6n
Sensor n Fail (0 OK, 1 Fail), n = 5 to 8
5=Sens1, 6=Sens2, 7 = Gas1, 8=Gas2
7n
Sensor n Filament Current (A), n = 1 to 4
1=Sens1, 2=Sens2, 3 = Gas1, 4=Gas2
7n
Sensor n Bias Voltage (V), n =5 to 8
5=Sens1, 6=Sens2, 7 = Gas1, 8=Gas2