INFICON Guardian EIES Controller - Manual (Page 69)

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Guardian Co-Deposition Controller Operating Manual
3.6.1 Layer Grid
Parameters on the Layer tab are unique to this layer. Those on the Film and
FilmCal tabs pertain to any layer using the film. Pause the mouse over any
parameter to see a brief description. Edit a parameter by clicking in the parameter's
value cell, then typing a value, or by selecting a value from a drop-down menu.
Time values may be entered in hh:mm:ss format, or as whole seconds (which are
automatically converted to hh:mm:ss format).
When you click in another cell, or press Enter, the parameter value is checked for
validity and stored in the process database. If the process is running, the
parameters are also sent to the EIES Controller.
Setpoint Å/s: The desired deposition rate for the layer. 0.00 causes the layer to be
skipped.The PID loop will control the channel output voltage during deposition to
achieve the setpoint. Rate is typically displayed in Angstroms per second (Å/s).
This value can be modified by user-supplied Units conversion factors consisting of
a Multiplier and Offset, found on the Channel tab. The displayed deposition rate is
calculated as:
Rate (Å/s) = (ChannelRate - QCMCalZero - xChan1 - xChan2 ) x QCMCalFactor [1]
- or -
Rate (User Units) = (Rate(Å/s) x UserMultiplier) + UserOffset [2]
Endpoint kÅ: The desired material thickness for the layer. 0.00 causes the layer
to be skipped.When Endpoint is reached, deposition ends for the layer. The value
is typically in kÅ, but may be scaled by the user units as described in Setpoint
above. The displayed thickness is calculated as:
Endpoint (kÅ) = Sum of (Rate(Å/s) x Measurement Period / 1000) [3]
- or -
Endpoint (UserUnits) = Sum of (Rate(UserUnits) x Measurement Period / 1000) [4]
EndSetPt kÅ: When EndSetPt is reached, the EndSetPt relay is activated. 0.00
disables the function. However, deposition continues until EndPoint thickness is
reached.
Time SetPt hh:mm:ss : Closes the Time Setpoint relay after a certain time up to
the maximum value of 23:59:59. If Time SetPt occurs before EndPoint thickness is
reached, the layer stops. A time SetPt value of 00:00:00 disables this function.