4 chassis cleaning, 5 troubleshooting – INFICON Guardian EIES Controller User Manual

Page 123

Advertising
background image

5 - 5

IP

N 07

4-

51

7-

P1

D

Guardian Co-Deposition Controller Operating Manual

7

Replace the Sensor cover.

8

Check the resistance between the emitter’s connector pins (it should be
approximately 1 ohm) and between one pin and the Sensor housing assembly
(it should exceed 1 megohm). Use the highest resistance range when checking
between a connector pin and the housing. Use the lowest when checking
between connector pins.

If there is continuity between the housing and the connector pins, check the
position of the emitter assembly and insure that it is properly installed.

If there is no continuity between the connector pins, the filament is open.

5.4 Chassis Cleaning

Use a damp cloth, wetted with water or a mild detergent, to clean the outer
surfaces.

5.5 Troubleshooting

High Voltage and Sensor 1 or 2 LEDs are blinking when sensor is turned on

Verify that the Interlock connector or equivalent connection is present, see

section 4.6.3.1 on page 4-19

. If present, contact

INFICON

Service.

Advertising