INFICON Guardian EIES Controller - Manual (Page 76)

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Guardian Co-Deposition Controller Operating Manual
3.6.6 Edit Layer Film Cal
NOTE: The parameters on the Film Cal. tab are Film parameters. They are
determined by the Film selected for a layer. If you change the parameters
on either of these tabs, they will be changed for any layer (in any process)
that uses the selected film.The Film Cal. tab displays parameters that
control the calibration and display of channel readings. Depending on the
Input type selected, all of the parameters listed may not be available.
Figure 3-18 Edit Layer Film Cal Display
3.6.6.1 Calibration Grid
Input: Selects which sensor is used for measurement of the channel. Select EIES
to use the selected EIES detector channel input. Select a QCM input to use an
SQM-242 card or Q-pod sensor for deposition measurement. SAM uses the
SAM-242 analog card inputs for measurement.
PMT Volts: 0 to 1250. Sets the bias voltage (gain) of the channel's photomultiplier
tube. The emission from different materials may require different PMT voltages to
optimize performance. Typical values range from 600 to 700. Use the lowest
setting that provides adequate signal. As PMT voltage is increased, PMT noise is
also increased, reducing the signal to noise ratio.