INFICON Guardian EIES Controller - Manual (Page 21)

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Guardian Co-Deposition Controller Operating Manual
1.8 Specifications
1.8.1 Sensor
Type . . . . . . . . . . . . . . . . . . . . . . . . . Single filament hot cathode or Dual filament
Gas Compensating
Sensor Materials . . . . . . . . . . . . . . . 304 SS, Inconel x-750,Tantalum, Ceramic
Filament Life (typical) . . . . . . . . . . . . ~1000 hours @ 1 x 10 -5 Torr
Filament Material . . . . . . . . . . . . . . . Thoria coated Iridium,
Optional Yttria coated
Filament Current. . . . . . . . . . . . . . . . 2 to 4 amps
Emission Current . . . . . . . . . . . . . . . Yttria: 2 mA max, Thoria 4 mA max
Bias Voltage . . . . . . . . . . . . . . . . . . . 180 Volts
Operating Pressure . . . . . . . . . . . . . 5 x 10
-4
Torr maximum
Operating/Bakeout Temperature
for in-vacuum components . . . . . . . . 450ºC maximum
Size . . . . . . . . . . . . . . . . . . . . . . . . . 1.94 L x 1.03 W x 0.81 H in.
(49 x 26 x 21 mm)
Mounting. . . . . . . . . . . . . . . . . . . . . . 2 ¾ in. CF (NW35CF) with sapphire viewport
Rigid SS tube from 7 in. to 16 in. (175 mm to
405 mm)
Optical Path . . . . . . . . . . . . . . . . . . . 1/2 in. (12.25 mm) dia. 304 SS rigid tube,
centerless ground (
InVac Cable . . . . . . . . . . . . . . . . . . . 16 AWG Mica insulated nickel clad Copper
Cable 016-509-Gxx
Optional ceramic bead insulated 0.050 in.
(1.3 mm) dia. Molybdenum wire Refractory
Cable 016-513-Gxx
External Wiring . . . . . . . . . . . . . . . . . 16 AWG except 18 AWG ground conductor,
40' (12 m) maximum