INFICON Guardian EIES Controller - Manual (Page 70)

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Guardian Co-Deposition Controller Operating Manual
Start Mode: A layer may start in three ways. In Auto, the layer starts immediately
upon completion of the previous layer. In Manual, the layer waits for the user to
click the Start button. If there are CoDep channels, they will also wait for a user
Start if any channel Start Mode is set to Manual.
Constant start is a special case used for controlling constant process variables
such as temperature and pressure. Constant start holds the channel at the rate
setpoint throughout the process. Only pressing Reset or completing the process
will set the channel output to zero.
Start Prompt: Allows a user prompt to appear at the beginning of a Manual Start
layer. If any text is entered in this parameter, it shows as an on-screen prompt with
two user choices: OK to start the layer, or cancel to stop the layer. This is useful for
prompting for operator actions such as opening valves or checking settings.
3.6.2 Rate Ramps Grid
Rate ramps change the initial rate setpoint. Each rate ramp has a starting
thickness, an elapsed time to ramp to the new rate setpoint, and a new Ramp#Rate
setpoint. Each layer can have two rate ramps.
NOTE: These rate ramps alter the rate during deposition. Do not confuse these
ramps with the preconditioning ramp/soak power ramps on the Film tab.
Ramp1 Start kÅ: The thickness that triggers a timed ramp to a new rate. Setting
Ramp1 Start to zero disables the rate ramp. Ramp1 Start should be less than the
layer Endpoint, otherwise the rate ramp is ignored.
Ramp1 Rate: The new deposition rate for the layer.
Ramp1Time: The time to ramp to the new Ramp1 Rate setpoint. If the rate ramp
is too fast, a PID control error may be generated.
Ramp2 Start kÅ: The thickness that triggers a timed ramp to a new rate. Setting
Ramp2 Start to zero disables the rate ramp. Ramp2 Start should be greater than
Rate1 Ramp and less than the layer Endpoint, otherwise the rate ramp is ignored.
Ramp2 Rate: The new deposition rate for the layer.
Ramp2Time: The time to ramp to the new Ramp2 Rate setpoint. If the rate ramp
is too fast, a PID control error may be generated.