INFICON Guardian EIES Controller - Manual (Page 74)

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Guardian Co-Deposition Controller Operating Manual
3.6.5.1 Deposit Grid
P Term: Sets the gain of the control loop. High gains yield more responsive (but
potentially unstable) loops. Try a low value then gradually increase/decrease to
respond as desired to step changes in setpoint.
I Term: The integral term controls the time constant of the loop response. A small
I term, say 0.5 to 1 seconds, will smooth the response of most loops. An I value of
0 effectively disables PID control.
D Term: The differential term causes the loop to respond quickly to changes. Use
0 or a very small value to avoid oscillations.
Shutter Delay: Shutter delay sets the time allowed for a channel to achieve
deposition control. Shutter delay assures that the channel reaches a certain
accuracy before deposition begins. If the accuracy is not reached, the process
halts. If accuracy is reached and maintained for 5 seconds before Shutter Delay
time, the substrate shutter opens and deposition begins. Set Shutter Delay to zero
to disable this function.
Shutter Capture: Sets the shutter delay rate accuracy that must be reached for
deposition to begin.
Error Action: If the control loop cannot maintain the desired Setpoint (due to loss
of source material, excessively high rate ramps, or equipment malfunction) a
control error occurs. When an error condition occurs, three actions are possible:
 Ignore the error and let the PID loop attempt to maintain rate control based on
"control percentage."
 Stop the layer and allow the user to fix or manually control deposition.
 Hold deposition at the last good Power setting to "estimate" rate and thickness.
For best results, use shutter delay to assure adequate process control before
entering the deposition phase.
Control Error: The rate error in percent that must not be exceeded during
deposition to prevent a control error. Set Control Percent to zero to disable this
function.
Max Power: The maximum output power allowed for the film. Max Power controls
the maximum % of the full scale voltage that can be used by this film in any process
phase.
Slew Rate: The maximum power change allowed on an output, per second. If rate
ramps or PID power requirements exceed this value, an error occurs.
Full Scale: The maximum output voltage for your deposition supply's input range.
Values from 0 to +/-10 V are possible.