1 format of the datalog file, 5 file >> print screen – INFICON Guardian EIES Controller User Manual
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Guardian Co-Deposition Controller Operating Manual
Log Interval: The elapsed time between data log entries. The data log is updated
only when the process is running.
Overwrite: The log file will be overwritten each time data logging is started by
pressing DataLog On on the main screen. Only the last run of the process is saved,
and it appears as FileName.LOG.
Append: Data is added to the end of the existing FileName.LOG file.
Run#: A data file, FileName_Run#.LOG, is written for each process run. Run# is
incremented each time the process is started. Enter a new Run# to reset the
counter.
Channel Data: Selects the channel(s) to log, and the data that is logged for each
channel.
Sensor Data: Selects the sensor(s) to log, and the data that is logged for each
sensor.
3.4.4.1 Format of the DataLog file
Start Log
Process Name
Run:364
Date
Time
Layer: 1 Setup:
Chan:1 Film:Se
Rate:000.000 Units:Å/s
Total:005.500 TimeSP:00:05:00
Chan:2 Film:Press Mon.
Rate:000.000 Units:Torr
Total:000.000 TimeSP:00:00:00
Chan:3 Film:Temp
Rate:000.000 Units:DegC
Total:000.000 TimeSP:00:00:00
Chan:4 Film:Se
Rate:000.000 Units:Å/s
Total:005.500 TimeSP:00:05:00
Time, Phase,
Chan#,
Rate,
Dev
Total
Power
00:00:05, RAMP
1,
CH1:,
0.00,
0.0,
000.0,
00.0,
00:00:10, RAMP
1,
CH1:,
0.00,
0.0,
000.0,
00.0,
How to Graph data in Microsoft Excel®:
Start the Excel program and select File >> Open. In the File Open dialog box,
select Files of Type: All Files. Navigate to the proper folder and click on the data
log you want to open, then click Open.
In the Excel Text Import Wizard select Delimited, then Next. Select Comma as the
delimiter. Check Treat Consecutive Delimiters as One. Select Text Qualifier
{None}. Click Finish to open the DataLog in Excel.
To graph the data, select the column with time, then each of the channel data
columns you wish to graph. For example, to graph channel rates select column A
(time), column D (Chan1 Rate), and column I (Chan2 Rate). Click Insert, Chart.
In the Chart Wizard select Line chart, then Next. The chart should appear with the
rates graphed against time. There will be some extra entries along the time axis;
you are welcome to clean this up, but the graph will be quite usable with just these
few steps.
3.4.5 File >> Print Screen
Sends a copy of the main screen to the printer selected in the Page Setup menu.