INFICON Guardian EIES Controller - Manual (Page 96)

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Guardian Co-Deposition Controller Operating Manual
Figure 4-3 EIES Sensor Cutouts
Figure 4-4 Sensor Placement
4.2.2 Sensor Covers
Two sensor covers are provided for the flux sensor, see Figure 2-2 on page 2-2 .
The High Rate cover 016-205-P1 is shipped installed on the flux sensor. The
Standard Rate cover 016-205-P2 is shipped separately in a poly bag. For MBE and
other applications where the sensor receives deposition rates below 10 Å/s or the
emission signal is weak, the Standard Rate cover may be preferable as it allows
more evaporant to enter the sensor. When replacing covers, be sure the cover is
securely snapped in place.
Smaller
Cutout
Larger
Cutout
The EIES sensor has two cutouts that allow the flux
to pass through the sensor. Place the smaller
cutout toward the flux, so that the flux exits via the
larger cutout
SOURCE
MA MA MA MA
OBSTRUCTION
SOURCE
BEST
MARGINAL
Avoid locations where obstructions such
as fixturing would interfere with the flux
of material through the sensor