INFICON Guardian EIES Controller - Manual (Page 84)

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Guardian Co-Deposition Controller Operating Manual
Q-pod: INFICON's Q-pod transducers are used for QCM measurements. The
serial number and revision of each installed Q-pod is shown.
Figure 3-25 QCM Tab Q-pod Selection
Period: Sets the QCM measurement period between .2 seconds (5 readings per
second) and 2 seconds. A longer period gives higher reading accuracy, especially
at low rates.
Max/Init/Min Frequency: The frequency values for the quartz crystal sensors
used as inputs to the QCM. Typical values are Max=6.1, Init=6.0, Min=5.0. Sensor
readings outside the min/max values cause a Sensor Fail error.