INFICON Guardian EIES Controller - Manual (Page 78)

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Guardian Co-Deposition Controller Operating Manual
3.6.6.2 QCM Grid
Cal QCM#: Establishes which QCM sensor is used to calibrate this channel's EIES
detector.
Density: Sets the QCM density for this material. Material density has a significant
impact on deposition calculations when a QCM is used for calibration or control.
See
Appendix B for common material densities.
Z-Factor: Sets the QCM Z-Factor or Z-Ratio, the measure of a material's effect
with increased thickness on QCM accuracy. See
Appendix B for common material
Z-ratios.
Tooling %: Adjusts for deposition rates measured by the QCM that differ from the
substrate deposition rate. A higher tooling value yields higher rates. See
Figure
3-19 . For example, if the sensor sees only 50% of the substrate rate, set Tooling to
200%. Setting Tooling to 0% causes a sensor to be ignored for this film.
The defining equation is:
[6]
Figure 3-19 Tooling Value
Cal Accuracy%: The EIES channel calibration accuracy to be achieved during
QCM calibration. A lower value means higher accuracy is required.
Cal Interval: The time interval between automatic QCM calibration of the EIES
channel. Set to 00:00:00 to disable periodoc automatic calibration.
Cal Sample: The time the QCM shutter remains open for QCM calibration of the
EIES channel.
Calibrate: Starts a QCM calibration cycle as defined by Cal Accuracy, Cal Interval
and Cal Sample. Shown only when the Layer version of this dialog box is selected.
Substrate Thick
Sensor Thick
-------------------------------------
Correct Tooling
Current Tooling
-------------------------------------- =
Substrate
Substrate
Tooling
Over 100%
Tooling
Under 100%