INFICON Guardian EIES Controller - Manual (Page 39)

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Guardian Co-Deposition Controller Operating Manual
When you are ready, return to the Edit Process dialog box shown in Figure 2-13
and click the indented CoDep film, immediately below Layer 1 Ch:1 Out:1 Se.
The Edit Layer dialog box will update to show the parameters for the selected layer.
In the Edit Layer dialog box, set this CoDep film to Channel 2, Output 2, and select
film In. On the Layer tab, enter a Setpoint of 5 Å/s and an Endpoint of 5 kÅ. On the
Film tab, set Ramp1 Power to 25% and set the remaining Film parameters to match
those for Se, as shown on the previous page. In the Film Cal tab, select EIES as
Input and set Cal QCM# to 2,
Figure 2-13 Edit Process
Return to the Edit Process dialog box and click the CoDep film immediately below
Codep Ch:2 Out 2 In. In the Edit Layer dialog box, set this CoDep film to Channel
3, Output 3, and film Ga. On the Layer tab, enter a Setpoint of 2 Å/s and an
Endpoint of 2 kÅ. On the Film tab, set Ramp1 Power to 15%. Edit the remaining
Film and Calibrate parameters to match those for In, as shown on the previous
page. That completes the definition of the first co-deposition layer, consisting of Se,
In, and Ga.
Edit Layer 2 so that the first entry is Layer 2 Ch:1 Out:1 Se with a rate Setpoint of
10 Å/s and thickness Endpoint of 10 kÅ. Change the codep layer for Layer 2 to
CoDep Ch:4 Out: 4 Cu with a Setpoint of 3 Å/s and Endpoint of 3 kÅ EIES Input.
When you are finished, you should have a 2-layer CIGS process as shown in
Figure 2-14 .