INFICON Guardian EIES Controller - Manual (Page 49)

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Guardian Co-Deposition Controller Operating Manual
2.5.3 Start Deposition
NOTE: Pump down the vacuum chamber to below 1E-5 Torr before operating the
EIES-IV system! Allow 1 hr warm-up for the PMT to reach optimum
stability.
On the EIES main screen verify that there is no error message in the Film column
on the channel(s) being used, and verify that Rate reading is near zero.
Figure 2-26 Verifying Rate Reading is Near Zero
On the main screen, turn Emission ON for the EIES sensor(s) you are using by
clicking ON under the sensor number on the left side of the screen. The rate
reading on each channel should still be near zero, but changing slightly.
Turn on your evaporation power supply. Click the Channel 1 Manual Power button
(on the right side of the screen). Enter a small power value and press Enter to send
the value to the power supply. Slowly increase power until the material vaporizes
and the rate reading starts to increase above zero.
If everything looks OK, increase the power to near the desired deposition rate. The
deposition rate can be determined before EIES calibration from previous
experience with the power supply output level, another measurement reference, or
from the optional QCM readings.
To optimize the detector PMT voltage, select View >> Readings to show the
detector readings. Click the channel Edit button. See
Figure 2-27 .