INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
Xtc/3, Thin film deposition controller
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Table of contents
Document Outline
- Cover Page
- Title Page
- Trademarks
- Disclaimer
- Copyright
- Declaration Of Conformity
- Warranty
- Table Of Contents
- Chapter 1 Introduction and Specifications
- 1.1 Introduction
- 1.2 XTC/3 Safety
- 1.3 How to Contact INFICON
- 1.4 XTC/3 Specifications
- 1.4.1 Measurement
- 1.4.2 Screens and Parameters
- 1.4.3 Process Recipe Storage
- 1.4.4 Display
- 1.4.5 Source / Recorder Outputs
- 1.4.6 Relays / Inputs
- 1.4.7 Remote Communications
- 1.4.8 Accessories
- 1.4.9 Power
- 1.4.10 Operating Environment
- 1.4.11 Storage Temperature
- 1.4.12 Warm Up Period
- 1.4.13 Size
- 1.4.14 Connector Clearance Requirements
- 1.4.15 Weight
- 1.4.16 Cleaning
- 1.5 Unpacking and Inspection
- 1.6 Parts and Options Overview
- 1.7 Initial Power On Verification
- Chapter 2 Installation and Interfaces
- Chapter 3 Operation
- 3.1 Front Panel Controls
- 3.2 Rear Panel Interfaces
- 3.3 Displays
- 3.4 Executing a Process
- 3.5 State Descriptions
- 3.6 Special Features
- 3.6.1 Automating a Process
- 3.6.2 Ion Assisted Deposition
- 3.6.3 Control Delay
- 3.6.4 Shutter Delay
- 3.6.5 Rate Ramp Trigger of Final Thickness
- 3.6.6 Transfer Sensor
- 3.6.7 Crucible Switching
- 3.6.8 Crystal Switching
- 3.6.9 Start Layer Without Backup Crystal Configuration
- 3.6.10 RateWatcher
- 3.6.11 Hand-held Controller (Option)
- 3.6.12 Lock Code
- 3.6.13 Parameter Clear
- 3.6.14 Datalog
- 3.6.15 TCP/IP
- Chapter 4 XTC/3 Programming
- Chapter 5 Remote Communications
- 5.1 Remote Communications Overview
- 5.2 Standard Protocol Message Format
- 5.2.1 Standard Protocol
- 5.2.2 Standard Communication Commands
- 5.2.2.1 Standard ECHO Command
- 5.2.2.2 Standard HELLO Command
- 5.2.2.3 Standard QUERY Commands
- 5.2.2.3.1 Query Block
- 5.2.2.3.2 Standard Query Film Name (XTC3/M only)
- 5.2.2.3.3 Standard Query Film Parameters
- 5.2.2.3.4 Standard Query General Parameter
- 5.2.2.3.5 Standard Query Input Definition (XTC/3M Only)
- 5.2.2.3.6 Standard Query Output Definition (XTC/3M Only)
- 5.2.2.3.7 Standard Query Output Type Definition (XTC/3M Only)
- 5.2.2.3.8 Standard Query Process Parameters (XTC/3M Only)
- 5.2.2.4 Standard UPDATE Commands
- 5.2.2.4.1 Update Block
- 5.2.2.4.2 Standard Update Film Name (XTC/3M only)
- 5.2.2.4.3 Standard Update Film Parameters
- 5.2.2.4.4 Standard Update General Parameters
- 5.2.2.4.5 Standard Update Input Definition (XTC/3M only)
- 5.2.2.4.6 Standard Update Output Definition (XTC/3M only)
- 5.2.2.4.7 Standard Update Output Type Definition (XTC/3M Only)
- 5.2.2.4.8 Standard Update Process Parameters (XTC/3M only)
- 5.2.2.5 Standard STATUS Commands
- 5.2.2.6 Standard REMOTE Commands
- 5.3 XTC/2 Protocols
- Chapter 6 Troubleshooting, Status and Error Messages
- Chapter 7 Calibration Procedures
- Chapter 8 Measurement and Control Theory
- Chapter A Material Table