INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
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XTC/3 Operating Manual
13
(0x0d)
Final thickness trigger
Causes the active film to react as if the final
thickness was reached.
14
(0x0e)
Crystal switch
If a multi-crystal sensor is attached to the unit, it
will switch to the next position.
15
(0x0f)
Enter comm. I/O mode
XTC/3S only.
This indicates that all digital outputs are under
remote communications control,
and their normal functions are overridden. XTC/3
must be in this mode to remotely set or clear
relays (R17 and R18). If the unit is an XTC/3M an
Illegal ID error is returned.
16
(0x10)
Exit comm. I/O mode
Used in XTC/3S only.
Exits the Communication I/O mode, returns all
digital outputs to normal, XTC/3 controlled
operation. If the unit is an XTC/3M an Illegal ID
error is returned.
17
(0x11)
Set (close) digital output
<Value> vv
vv = <Byte> (output # 1- 20).
In XTC/3S the Communication I/O mode must
be active for this command to operate.
In XTC/3M, the selected output must be set to
Computer Control for this command to operate.
18
(0x12)
Clear (open) digital output
<Value> vv
vv = <Byte> (output # 1-20).
In XTC/3S the Communication I/O mode must
be active for this command to operate.
In XTC/3M, the selected output must be set to
Computer Control for this command to operate.
19 (0x13)
Turn Backlight on
Turns the LCD backlight full on
20 (0x14)
Turn Backlight off
Turns the LCD backlight full off
21 (0x15)
Trigger beeper
Sounds an audible beep
22 (0x16)
Clear power up error flag
Clears the power up error.
26
(0x1a)
Clear All Crystals
Sets the crystal status for all the crystals
in the current sensor to good.
27
(0x1b)
Rotate head
If the current sensor selected is a CrystalSix,
Crystal12, Rotary or Dual Head, the sensor will
perform a full rotation and all crystals will be
verified. Returns an A response error code if
configured for a Single, Crystal Two or Dual
Head.
Returns a F response error code if no output is
defined.
Table 5-5 Standard remote commands (continued)
R
(0x52)
Command
ID
Function
Description