INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
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XTC/3 Operating Manual
4
(0x04)
Current State
(Byte) - Decoded as follows: -
0 = Ready
1 = Crucible Switch
2 = Rise 1
3 = Soak 1
4 = Rise 2
5 = Soak 2
6 = Shutter Delay
7 = Deposit
8 = Rate Ramp
9 = Manual
10 = Time Power
11 = Idle Ramp
12 = Idle
5 (0x05)
Current State Time
(Int) - Number of seconds -
6 (0x06)
Active Layer
(Int)
7 (0x07)
Active Film
(Byte)
8 (0x08)
Active Sensor
(Byte) ( 1 or 2)
9 (0x09)
Crystal Life
(Byte)
10 (0x0a)
Power Source
(Byte) ( 1 or 2)
11
(0x0b)
Output Status Byte
(4 Byte) - Each bit represents an output -
(0 = not set, 1 = set)
Output 1 = LSB, Output 20 = 20th bit
12
(0x0c)
Input Status Byte
(2 Byte) - Each bit represents an input -
(0 = not set, 1 = set)
Input 1 = LSB, Input 9 = 9th bit
0x0100 = Input 1
0x0200 = Input 2
0x0400 = Input 3
0x0800 = Input 4
0x1000 = Input 5
0x2000 = Input 6
0x4000 = Input 7
0x8000 = Input 8
0x0001 = Input 9
0x0300 = Input 1 & 2
0x0101 = Input 1 & 9
0x3800 = Input 4, 5 & 6 etc
13
(0x0d)
Raw Frequency
(Int DDS units). - Multiply by 0.0034924596 to convert
to hertz.-
Table 5-4 Standard Status commands (continued)
S
(0x53)
Command ID
Description
Response:
Description (Data Format) Units -Detail-