INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 39)

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XTC/3 Operating Manual
2.2.2 Connections to Earth Ground
There are two earth connections, both must be present:
 The ground connection on the controller is a threaded stud with a hex nut. One
suggestion is to connect a ring terminal to the ground strap, thus allowing a
good connection to a solid copper bar ground bus, and easy removal and
installation. Use at least 0.5 in. copper braid strap or 16 AWG copper wire not
exceeding 12 in. in length to achieve best immunity against electrical noise.
See
Figure 2-3 on page 2-6 for the suggested method of grounding.
 XTC/3 is also connected to earth via a sealed three-core power cable, which
must be plugged into a socket outlet with a protective earth terminal. Extension
cables must always have three conductors including a protective earth
conductor. This ground provides for personal safety but is ineffective for
suppressing electrical noise.
WARNING - Risk Of Electric Shock
Never interrupt the protective earthing intentionally. Any
interruption of the protective earth connection inside or
outside XTC/3, or disconnection of the protective earth
terminal is likely to make XTC/3 dangerous.
This symbol indicates where the protective earth ground
is connected inside XTC/3. Never unscrew or loosen this
connection.
CAUTION
An external ground connection is required to ensure
proper operation, especially in electrically noisy
environments.
When used with RF powered sputtering systems, the grounding method may have
to be modified to the specific situation. An informative article on the subject of
Grounding and RFI Prevention was published by H.D. Alcaide, in “Solid State
Technology”, p.117, April, 1982.