INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 166)

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XTC/3 Operating Manual
R LOCK
Indicates XTC/3 is in a Remote Program Lock mode. This prohibits any
parameter from being entered from the front panel until the lock is released
via remote communications.
RATE DEV ERR
Indicates XTC/3 entered the Stop mode because rate control was not
achieved within 60 seconds.
RATEWATCH DELAY
The RateWatcher feature is active. The sensor is stabilizing for 5 seconds
before SAMPLE. The previous sample period’s Average Rate is being
integrated for thickness. The previous sample period’s Average Power is
being held constant.
RATEWATCH HOLD
The RateWatcher feature is active. The sensor shutter is closed. The
previous sample period’s Average Rate is being integrated for thickness.
The previous sample period’s Average Power is being held constant.
RATEWATCH SAMPLE
The RateWatcher feature is active. The sensor shutter is open. The source
rate is being measured and it’s power controlled.
RS-232 FAILED
Indicates the self test with the loop back connector failed. Indicates a
hardware defect either in XTC/3 or the loop-back connector.
RS-232 PASSED
Indicates the self test with the loop back connector passed.
SHUTTER DELAY
The layer is in the Stop state because rate control was not achieved within
60 seconds while in the Shutter Delay state.
SOAK HOLD
The current source has paused execution and will maintain the current power
level until the hold is turned off.
START INHIBITED
The Start command was not processed because the Start Inhibit input is set.
STOP
The layer is in the STOP state. There will always be another message on the
screen at the same time to indicate the cause of the Stop.
SWITCHER FAIL
Indicates defect in multi-position sensor.
TEST
Indicates XTC/3 is in TEST mode.