INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 165)

6 - 3
PN
07
4-
44
6-
P1
J
XTC/3 Operating Manual
NO MANUAL XTAL FAIL
Unable to enter Manual operation.
NO MANUAL IN STOP
Unable to enter Manual operation.
NO MANUAL IN IDLE
Unable to enter Manual operation.
NO OUTPUT FOR SW
A rotate or switch crystal head function cannot be performed if no output has
been set for the function.
NO SWITCH SINGLE
A crystal switch function cannot be done on a single sensor.
NON-DEP HOLD
Indicates the Non-Dep Hold input is set and will maintain the layer in the
non-deposit hold state if the layer is not already in Deposit or Shutter Delay.
NOT RELAY OUTPUT
This message appears when attempting to set a TTL output on the
Relay screen.
NOT TTL OUTPUT
This message appears when attempting to set a Relay output on
the TTL screen.
ONE SEL PROC ONLY
This message appears when attempting to set more than one Select Process
input event.
ONE WIRE READ FAIL
(Diagnostic Page) Contact INFICON.
PARAMETER DEFAULT
Indicates XTC/3 parameters have been set to their default values. Any
previously programmed values will have been changed to the default values.
POWER LOSS
Indicates XTC/3 lost line power immediately prior to the current
power on cycle.
PROCESS RUNNING
Message appears if trying to enter the Diagnostics mode while a process
is running.
PROCESS VAR DEFAULT
Indicates XTC/3 process variables have been set to their default values. Any
previous process variables will have been changed to the default values.