INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 84)

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XTC/3 Operating Manual
4.2.2 Film Definition
A film is defined by the parameters needed to run it, including sensor and source
numbers, source heat-up and cool down parameters, deposition rate and final
thickness, material parameters, control loop parameters, etc. XTC/3M can define
32 films which can be named. All films will start with defaulted values for the
parameters. These can be modified in any order. A film becomes a layer in a
process when its film number is selected in the process.
XTC/3S does not have processes or layers. Nine films, 1 to 9, may be defined but
not named, and a General parameter will indicate which film to run.
On entering the film screen, the film displayed will be the one displayed when this
screen was last left. A different film can be displayed by moving to the Film
Number and entering that film number.
If the parameters are locked from the keyboard, the L Lock message will be
displayed in the upper right corner. If they are locked via Remote Communications,
the R Lock message will be displayed. The parameter values will be displayed only
and cannot be changed until the lock code is entered. With the parameters locked,
the film number may still be changed to allow viewing of other films.