INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 87)

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XTC/3 Operating Manual
4.2.3.2 Deposit
Figure 4-3 Deposit Film Programming screen
FILM NUMBER . . . . . . . . . . . . . . . . 1 to 32 (XTC/3M)
1 to 9 (XTC/3S)
RATE . . . . . . . . . . . . . . . . . . . . . . . . 0.0 to 999.9 Å/s
This specifies the rate at which the deposition is to be controlled during the
DEPOSIT and Shutter Delay states. A value of 0.0 Å/sec allows skipping of the
deposit state. The default value is 0.0 Å/sec.
FINAL THICKNESS . . . . . . . . . . . . . 0.000 to 999.9 kÅ
This is the thickness setting that triggers the end of the DEPOSIT state. The
Source Shutter and Crystal Shutter relays return to their normal states and the
Layer enters the Idle Ramp state. The default value is 0.000 kÅ.
THICKNESS SET POINT. . . . . . . . . 0.000 to 999.9 kÅ
This sets the thickness at which the Thickness Set Point is triggered and the
New Rate (if non-zero) is initiated. This thickness begins to accumulate after
entering the Deposit state. The state remains active after reaching the
Thickness Set Point until the beginning of the IDLE state.
The default value is 0.000 kÅ.
NEW RATE. . . . . . . . . . . . . . . . . . . . 0.0 to 999.9 Å/sec
This value sets the newly desired control rate when the Thickness Set Point
is reached. The default value is 0.0 Å/sec which disables the feature. A value
of 0.1 Å/sec triggers Final Thickness at the end of the Rate Ramp Time,
see
section 3.6.5 on page 3-25 .
RATE RAMP TIME. . . . . . . . . . . . . . 00:00 to 99:59 min:s
This value determines the time period over which to ramp the rate from the
original rate to the New Rate. The default value is 00:00.