INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 79)

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XTC/3 Operating Manual
6 Average Power = xx.x %
7 S Value = 0 to 9999
8 Q Value = 0 to 99
9 Begin Frequency = xxxxxxxx.x Hz
10 End Frequency = xxxxxxxx.x Hz
11 Xtal Life = xx % (0 - 99)
12 Normal Completion or
13 End On Time Power or
14 End In Stop from (Stop Reason). Stop Reasons are one of the following:
 Keyboard
 Xtal Fail
 Max Power
 Hand Controller
 Communications
 Digital Input
 Power Loss
 Rate Dev Fail
 Crystal Switch Fail
NOTE: If the layer is the first one of a process, a preface Begin Process xxx
(xxx is the process number or name (XTC/3M only), if the name is
programmed.) is output. If the layer is the last one of the process, a
postscript End Process is output. The data log information is available via
the remote communications S19 command. See Remote Communication
status commands,
section 5.2.2.5 on page 5-29 or section 5.3.5.5 on page
5-42 .
3.6.15 TCP/IP
The optional TCP/IP interface will provide all the commands available through the
standard RS232 interface. The interface uses a static address entered via XTC/3
front panel (see
section 4.4.3.1 on page 4-25 ).
DHCP is not supported.