INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
Page 136
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5 - 24
PN
07
4-
44
6-
P1
J
XTC/3 Operating Manual
29
(0x1d)
Z-Ratio
Float
x.xxx
xx.xx
xxx.x
0.100
9.999
30
(0x1e)
Time Power
1=Yes,
0 = No
Int
0
1
31
(0x1f)
Delay option
0 = None
1 = Shutter
2 = Control
3 = Both
Int
0
3
32
(0x20)
1
Transfer Sensor
1=Yes, 0 = No
Cannot change if film is
running
Int
0
1
33
(0x21)
1
Transfer Tooling
%
Float
xxx.x
10.0
500.0
34
(0x22)
1
Control Delay
Time
MM:SS
(Seconds)
Int
0
99:59
(5999)
35
(0x23)
2
Ion Assisted
Deposit
1=Yes,
0 = No
Int
0
1
36
(0x24)
Graph Label
0 = Rate Dev
1 = Power
Int
0
1
37
(0x25)
Graph Scale
0 = 5
1 = 10
2 = 20
3 = 40
Int
0
3
255
(0xff)
2
All Parameters
section 4.2.3.5, Option, on page 4-14
2
Cannot change when a film is running.
Table 5-2 Standard film parameters (continued)
UF
(0x5546)
Command
ID
Name
Units / Allowed
Values / Notes
Data
Type /
Format
Low
Limit
High
Limit
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