INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 175)

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XTC/3 Operating Manual
3. crystal does not oscillate or
oscillates intermittently (both in
vacuum and in air) a. intermittent or poor electrical
contact (contacts oxidized) a. use an ohm meter or DVM to
check electrical continuity,
clean contacts
b. leaf springs have lost
retentivity (ceramic retainer,
center insulator) b. bend leaves to
approximately 45°
c. RF interference from
sputtering power supply c. verify earth ground, use
ground strap adequate for RF
ground, change location of
XTC/3 and oscillator cabling
away from RF power lines,
connect XTC/3 to a different
power line
d. cables/oscillator not
connected, or connected to
wrong sensor input d. verify proper connections,
and inputs relative to
programmed sensor
parameter
4. crystal oscillates in vacuum
but stops oscillation after open
to air a. crystal was near the end of
its life; opening to air causes
film oxidation which increases
film stress a. replace crystal
b. excessive moisture
accumulates on the crystal b. turn off cooling water to
sensor prior to venting, flow
warm water through sensor
while chamber is open
Table 6-2 Troubleshooting transducers/sensors (continued)
SYMPTOM CAUSE REMEDY