INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
Page 155
5 - 43
PN
07
4-
44
6-
P1
J
XTC/3 Operating Manual
S6 . . . . . . Active layer. x
S7 . . . . . . Active film x
S8 . . . . . . Active sensor. x
S9 . . . . . . Crystal life (%). x % to xx %
S10 . . . . . Power source number. x (1 or 2)
S11 . . . . . Output status - returns a string of 16 ASCII bytes, 1 per output. Each
byte has an ASCII value of 0 or 1, corresponding to the output status.
Response Format (Non-Checksum):
Byte1............Byte16<ACK> where byte 1 corresponds to output 1.
Table 5-9 XTC/2 Output Status bits
Output#
Output Default
function
Output state
1
Source Shutter 1
1=open, 0=closed
2
Source Shutter 2
1=open, 0=closed
3
Sensor Shutter 1
1=open, 0=closed
4
Sensor Shutter 2
1=open, 0=closed
5 Stop
1=Stop,
0=not
stop
6
End of Process
1=End of process, 0=not end of process
7 Thickness
Setpoint 1=Thk
Setpoint
8
Soak 2
1=Soak 2 phase
9
Crystal Fail
1=Xtal Fail
10 Alarms
1=Alarm
Cond.
11
Source 1/Source 2,
(toggle)
1=Source 2, 0=Source 1
12 End
Deposit
(Final Thickness)
1=End Deposit (Final Thickness) reached
13
Crucible Select LSB
(XTC/2)
BCD value representing crucible position
of active source:
000 = Position 0 or 1
111 = Position 8
14
Crucible Select (XTC/2)
15
Crucible Select MSB
(XTC/2)
16 unused