INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual

Page 49

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XTC/3 Operating Manual

5 RS-232C Remote Communication Connector

Provides a 9-pin RS-232C communications port.

6 Ground Stud

See

section 2.2.2, Connections to Earth Ground, on page 2-5

.

7 Recorder DAC Output

Provides 0 to 10 V output selectable to correspond to Rate, Rate Deviation, and
Thickness at various ranges and Power (BNC connector).

8 Aux I/O Connector

Provides pin connection for 6 Relays rated for 30 V (dc) or 30 V (ac) RMS or
42 V (peak) maximum, eight logic outputs, and one logic input.

9 System I/O Connector

Provides pin connection for 6 Relays rated for 30 V (dc) or 30 V (ac) RMS or
42 V (peak) maximum, and 8 logic Inputs.

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