INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
Page 49
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XTC/3 Operating Manual
5 RS-232C Remote Communication Connector
Provides a 9-pin RS-232C communications port.
6 Ground Stud
See
section 2.2.2, Connections to Earth Ground, on page 2-5
.
7 Recorder DAC Output
Provides 0 to 10 V output selectable to correspond to Rate, Rate Deviation, and
Thickness at various ranges and Power (BNC connector).
8 Aux I/O Connector
Provides pin connection for 6 Relays rated for 30 V (dc) or 30 V (ac) RMS or
42 V (peak) maximum, eight logic outputs, and one logic input.
9 System I/O Connector
Provides pin connection for 6 Relays rated for 30 V (dc) or 30 V (ac) RMS or
42 V (peak) maximum, and 8 logic Inputs.
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