INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 172)

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XTC/3 Operating Manual
7. LCD display blank a. LCD or CRT/power supply
problem a. contact INFICON
b. LCD Dimmer Time has
elapsed. b. press the cursor key to redraw the
screen.
8. poor rate control a. control loop parameters
improperly selected a. refer to the instruction manual
section on tuning control loop
parameters
b. electron beam sweep
frequency "beating" with
XTC/3 measurement
frequency b. adjust the sweep frequency so it is
not a multiple of XTC/3 measurement
frequency (4 Hz)
9. power-on LED blinking a. internal hardware defect a. contact INFICON
10. crystal fail message is
always on a. XIU/oscillator not connected a. verify proper sensor/oscillator
connections
b. XIU oscillator malfunctioning b. if available, insert a known working
XIU/oscillator in place of suspect one; if
XIU/oscillator is confirmed bad, contact
INFICON
c. defective cable from
feedthrough to XIU/oscillator or
from XTC/3 to XIU/oscillator c. use an ohm meter or DVM to check
electrical continuity or isolation as
appropriate
d. poor electrical contact in the
transducer, feedthroughs, or
in-vacuum cable d. use an ohm meter or DVM to check
electrical continuity or isolation as
appropriate
e. failed crystal/no crystal e. replace crystal/insert crystal
f. two crystals placed into the
crystal holder f. remove one of the crystals
g. frequency of crystal out of
range g. verify that the crystal frequency is
within the required range, use INFICON
crystals.
h. Xtal failed due to S or Q
failure. h. clear S & Q values on
Sensor page
Table 6-1 Troubleshooting XTC/3 (continued)
SYMPTOM CAUSE REMEDY