INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 88)

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XTC/3 Operating Manual
RW ACCURACY . . . . . . . . . . . . . . . 1 to 99%
During the rate sampling period, the deposition rate is measured by the crystal
and source power control is active. When the measured rate is within the
desired accuracy continuously for five seconds, the shutter is closed and the
deposition state returns to HOLD. The minimum accuracy is 1% or 0.5 Å/s,
whichever is greater. The default value is 5%.
RW HOLD . . . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s
RW HOLD determines the time interval between sample periods. The crystal
shutter relay is in its normal state during this time.
The default value is 00:00, which disables the function.
During a Rate Ramp, the Sample and Hold feature is inactive; the crystal
shutter is open and the rate is controlled by the crystal.
4.2.3.3 Sensor Parameters
Figure 4-4 Sensor Film Programming screen
SENSOR . . . . . . . . . . . . . . . . . . . . . 1, 2
Selects the sensor to use for the film. Default value is 1.
TOOLING . . . . . . . . . . . . . . . . . . . . . 10.0 to 500.0%
The TOOLING parameter applies to the primary crystal.
SECOND TOOLING. . . . . . . . . . . . . 10.0 to 500.0%
The SECOND TOOLING parameter applies when the Crystal Two’s crystal
switch relay becomes active. This parameter is not accessible unless a Crystal
Two sensor is in use.
The default value for both is 100%.