INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 158)

5 - 46
PN
07
4-
44
6-
P1
J
XTC/3 Operating Manual
S21. . . . . Error Flag - If more than one error code exists, the response string will
return them all, each separated by a single space.
S21 Response Codes:
0 Error 0
2 Power Fail or STBY/ON sequence
9 Error 9
10 No Errors
S22. . . . . XTC/3 configuration readout, same as S20.
S30. . . . . Returns status of each crystal of a multi-head sensor.
S31. . . . . Returns a rolling 6.25 second average (updated every 0.25 seconds) of
the measurement rate.
5.3.5.6 XTC/2 REMOTE Commands
The format of the Remote command is:
R xx vvv (a space is required between the xx and the vvv)
where:
R . . . . . . Is the literal R
xx . . . . . . Is the remote code per list below.
vvv . . . . . Is the associated value needed for some remote commands.
R0. . . . . . Start. Equivalent to pressing the START key.
R1. . . . . . Stop. Equivalent to pressing the STOP key.
R2. . . . . . Reset. Equivalent to pressing the RESET key.
R3. . . . . . Remote Lock On. Prohibits any parameter from being entered
via the front panel.
R4. . . . . . Remote Lock Off. Clears remote lock condition.
R5. . . . . . Crystal fail inhibit on. Simulates remote input.
R6. . . . . . Crystal fail inhibit off. Simulates release of remote input.
R7. . . . . . Soak hold 2 on. Simulates remote input.
R8. . . . . . Soak hold 2 off. Equivalent release of remote input.
R9. . . . . . Manual on. Equivalent to front panel MPWR keystroke.
R10. . . . . Manual off. Equivalent to front panel MPWR keystroke.
R11 . . . . . Set power level vv. Sets the active source’s power to vv% if unit is
in Manual mode.