INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 154)

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XTC/3 Operating Manual
NOTE: In XTC/2 one can program a zero film number in layer two and a good film
number in layer three. This is not allowed in XTC3. If a zero is programmed
in layer two and there is a good film number in layer three the film in layer
three is then placed in layer two. Layer three is then empty.
U 40 2 v or U 40 3 v is not allowed in XTC3S since only one film is allowed
in XTC3S.
5.3.5.5 XTC/2 STATUS Command
Sends back information based on specific request made.
The format of the status command is:
S xx . . . . Return the status (value) of xx
where:
S. . . . . . . Is the literal S
xx . . . . . . One or two digit code per list below:
S0 . . . . . Process information. All the information from S1 to S10, separated
by spaces.
S1. . . . . . Rate (Å/s) currently read. x.x to xxx.x Å/s
S2. . . . . . Power (%) currently output. x.x to xxx.x %
S3. . . . . . Thickness (KÅ) currently accumulated. x.xxxx kÅ to xxxx.xxxx kÅ
S4. . . . . . Phase currently in process. x
S4 Response Codes
0 . . . . . . . Ready phase
1 . . . . . . . Source switch phase
2 . . . . . . . Rise 1 phase
3 . . . . . . . Soak 1 phase
4 . . . . . . . .Rise 2 phase
5 . . . . . . . Soak 2 phase
6 . . . . . . . Shutter delay phase
7 . . . . . . . Deposit phase
8 . . . . . . . Rate ramp phase
9 . . . . . . . Manual phase
10 . . . . . Time power phase
11 . . . . . . Idle ramp phase
12 . . . . . . Idle phase
S5. . . . . . Phase time (mm:ss). xx:xx