INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
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XTC/3 Operating Manual
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Table 1-1 Crystal12 sensor
Crystal12 Sensor Package XL12-xxxxX
XL12-
Base Unit
None
0
Crystal 12 Sensor
1
In-Vacuum Cable Assembly Length
None
0
78 cm (30.75 in.)
1
15.2 cm (6 in.)
2
30.5 cm (12 in.)
3
61 cm (24 in.)
4
91.4 cm (36 in.)
5
121.9 cm (48 in.)
6
152.4 cm (60 in.)
7
182.9 cm (72 in.)
8
Crystal Carousel Assembly
One (Included in Base Unit)
0
Spare Crystal Carousel Assembly
1
Front Deposition Shield
One (Included in Base Unit)
0
Spare Front Deposition Shield
1
Mounting Post with Hardware
None 0
Mounting Post Kit
1
Example: Crystal12 sensor with 78 cm (30.75 in.) cable, spare
carousel, spare front deposition shield, mounting post kit, and
solenoid valve is PN XL12-11111.