INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
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XTC/3 Operating Manual
1
Make sure XTC/3 is in READY or IDLE.
2
Press START. The next layer to be run will enter pre-deposition, and continue
on through deposition and post-deposition.
3
When the layer is complete, XTC/3 will go to IDLE. If AutoStart Next Layer
(XTC/3M only) has been set to Yes in the Process sub-screen of the General
Parameter display, the next layer, if there is one, will be started automatically.
If not, press START again to begin the next layer.
Repeat until the process is complete.
4
If at some point there is a need to interrupt or discontinue the process, press
STOP. This will close the sensor and source shutters, set the control voltage
output to zero, and freeze the display. The process can be restarted where it
left off by pressing START. (The pre-deposition phases will be repeated.) To
completely abandon the run, press RESET after STOP.
5
A critical error may occur while a process is running.
For example, a crystal failure on a single crystal sensor head may occur in
pre-deposition. XTC/3 will automatically STOP or go into Time-Power (if the
crystal failure occurs while in Deposit and the Time-Power option is set to
Yes). Assuming the error has been remedied, the process can be continued
where it left off by pressing START. Pressing RESET will abandon the run.