INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 72)

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XTC/3 Operating Manual
accessible. If rate control is not achieved ( see page 4-14 ) the Delay Failure Alarm
message appears. If Stop on Alarms is in the default setting of No, the power
continues to increment until Max Power is reached.
3.6.7 Crucible Switching
Crucible position output lines can be used to control evaporation sources with up
to eight crucible positions. When the Crucible parameter for a source is set to be
non-zero, power will not be applied to the source until the Cruc x Valid input
becomes active. A Crucible Sw message will be displayed during that time. After
thirty seconds without the Cruc Valid input becoming true (low), a Crucible Sw
Fail message will be displayed.
3.6.7.1 Bin mode
In Bin mode, eight individual sequential outputs, labeled Cruc Src 1 Bin for
Source 1 crucibles or Cruc Src 2 Bin (XTC/3M only) for Source 2 crucibles, one
per position, are used. See
Table 2-3 on page 2-10 for the fixed XTC/3S TTL output
assignments. These assignments will apply to the currently active source, 1 or 2.
In XTC/3M, either 8 sequential relay outputs or 8 sequential TTL outputs can be
assigned (see
section 4.5.3 on page 4-29 ).
3.6.7.2 BCD mode (XTC/3M only)
In BCD mode, three sequential outputs are used so that 000 represents position
1 and 111 represents position 8. The BCD outputs, labeled Cruc Src 1 BCD for
Source 1 crucibles and Cruc Src 2 BCD for Source 2 crucibles, can be configured
through the Relay or TTL Outputs sub-screen of the I/O Map screen (see
section
4.5.3 on page 4-29 ).
3.6.8 Crystal Switching
XTC/3 offers a choice of Single, CrystalTwo, CrystalSix, Crystal12, Rotary or Dual
Head sensors. The CrystalTwo, CrystalSix, Crystal12, Rotary and Dual Head
sensors provide one or more backup crystals in case a crystal fails during
deposition. Sensor types are specified on the Hardware sub-screen of the General
Parameter display (
see page 4-21 ).
The CrystalTwo option requires the PN 750-212-G2 Dual Sensor with a
PN 779-220-G1 or PN 779-220-G2 XTAL 2 Switch.
The Dual Head option requires the PN 750-212-G2 Dual Sensor with a second XIU
in place of the PN 779-220-Gx XTAL 2 Switch. The normally uncovered crystal is
connected to Sensor 1, the backup crystal normally covered by the shutter is
connected to Sensor 2.
All multi-position and shuttered sensors require the Solenoid Valve
(PN 750-420-G1) and a feedthrough with an air tube.