INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
Page 152
5 - 40
PN
07
4-
44
6-
P1
J
XTC/3 Operating Manual
12
Xtal Switch S
0 - 9 (See XTC/2 manual section 4.6)
13
Xtal Switch Q
0 - 9 (See XTC/2 manual section 4.6)
14
Tool Factor 1
10 - 500.0
15
Tool Factor 2
10 - 500.0
16
Deposition Rate
0 - 999.9
17
Final Thickness
0.0 - 999.9
18
Thickness Spt
0.0 - 999.9
19
Density
0.5 - 99.99
20
Z-Ratio
0.1 - 9.999
21 Sensor
1
-
2
22 Source
1
-
2
23 Crucible
0
-
8
24 Control
Gain
0.01-
100.0
25
Control TC
0.1 - 100
26
Control DT
0.1 - 100
27
Max Power
0.0 - 100.0
28
Sample
0 - 99
29
Hold Time
0 - 5999 or 00:00 - 99:59
30-39 **
NOT USED **
40 Layer
1-3
1
0-9
2
99 All
1) May be 0 for Q command; if 0, will return values for layers 1 - 3.
In an XTC3/S there is only one layer. Q 40 2 or Q 40 3 returns an error.
Q 40 0 returns 1 0 0. In XTC/3M, if there is no film in the layer, Q 40 2 or Q 40 3 will
return a NO DATA error.
2) Only applies to U 40 command. 0 is not allowed for layer 1.
Table 5-7 XTC/2 parameter definition table (for QUERY and UPDATE commands)
XTC/2 PP
XTC/3
Parameter Range