1 system i/o connector – INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
Page 43
2 - 9
PN
07
4-
44
6-
P1
J
XTC/3 Operating Manual
2.3.3.2.1 System I/O Connector
Table 2-1 System I/O connector
Description
Pin #
XTC/3S Function
Relay 1
1, 2
Source Shutter 1
Relay 2
3, 4
Source Shutter 2
Relay 3
5, 6
** Sensor Shutter 1
Relay 4
7, 8
** Sensor Shutter 2
Relay 5
9, 10
Stop
Relay 6
11, 12
End of Process
Input 1
18
Start
Input 2
19
Stop
Input 3
20
End deposit
Input 4
21
*
Sample Initiate
Input 5
22
*
Sample Inhibit
Input 6
23
*
Crystal Fail Inhibit
Input 7
24
*
Zero thickness
Input 8
25
*
Soak 2 Hold
Ground
13,14,15,16,17
Input Common
* These input functions may be reassigned according to
.
** Used for Crystal Switching for a XTC/3S
Table 2-2 Film Select Option selected in XTC/3S General / Process screen
Input #
Pin #
Function
Description
4
21
RESET
pin22
pin23
pin24
pin25
Film #
5
22
Film Select MSB
0
0
0
X
1
6
23
Film Select
0
0
1
0
2
7
24
Film Select
0
0
1
1
3
8
25
Film Select LSB
0
1
0
0
4
0
1
0
1
5
0
1
1
0
6
0
1
1
1
7
1
0
0
0
8
1
0
0
1
9
1
X
1
X
1
X = Does not matter