INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 178)

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XTC/3 Operating Manual
8. CrystalSix and Crystal12:
crystal switch problem (does
not advance or not centered in
aperture) a. loss of pneumatic supply, or
pressure is insufficient for
proper operation a. ensure air supply is
regulated at 80-90 PSIG
b. operation has been impaired
as a result of material
accumulation on cover b. clean material accumulation
as needed, refer to either the
CrystalSix manual PN 074-155
or Crystal12 manual
PN 074-398 on CD
PN 074-5000 for maintenance
c. improper alignment c. realign as per instructions in
either the CrystalSix manual
PN 074-155 or Crystal12
manual PN 074-398 on CD
PN 074-5000
d. 0.0225 in. diameter orifice
not installed on the supply side
of solenoid valve assembly. d. install orifice as shown in
either the CrystalSix manual
PN 074-155 or Crystal12
manual PN 074-398 on CD
PN 074-5000
9. Crystal12: Carousel Open
and Xtal Fail messages remain
after installing carousel. a. open circuit a. initiate a Crystal Switch or
Rotate Head function
10. Crystal12: Unit indexes
twelve times and displays Xtal
Switch Error, Xtal Fail, and
Carousel Open message. a. loss of electrical signal a. check for electrical
continuity and isolation
b. resistor #1 is open b. check for electrical
continuity and isolation
c. no carousel installed c. install carousel
d. torsion spring of electrical
connection assembly broken d. replace electrical connection
assembly — refer to Crystal12
manual PN 074-398 on CD
PN 074-5000
Table 6-2 Troubleshooting transducers/sensors (continued)
SYMPTOM CAUSE REMEDY