INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
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XTC/3 Operating Manual
Install the sensor as far as possible from the evaporation source
(a minimum of 10 in. [254 mm] is recommended) while still being in a position to
accumulate thickness at a rate proportional to accumulation on the substrate.
shows proper and improper methods of installing sensors.
Figure 2-2 Sensor installation guidelines
To guard against spattering, use a source shutter or crystal shutter to shield the
sensor during the initial soak periods. If the crystal is hit with even a small particle
of molten material, it may be damaged and stop oscillating. Even in cases when it
does not completely stop oscillating, it may become unstable.
Follow these precautions:
Mount the sensor to something rigid and fixed in the chamber. Do not rely on
the water tubes to provide support.
Plan the installation to insure there are no obstructions blocking the path
between the Sensor and the Source. Be certain to consider rotating
or moving fixtures.
Install sensors so their central axis (an imaginary line drawn normal to the
center of the crystal’s face) is aimed directly at the virtual source being
monitored. Verify that the total length of external and internal coax cable from
the standard PN 780-600-G1 oscillator to the sensor does not exceed
100 in. (254 cm). An optional PN 780-600-G2 oscillator is available to handle
118 in. to 158 in. (3 m to 4 m) long in-vacuum coax cables.
Be sure there is easy access for the exchange of crystals.
For systems employing two XTC/3 for simultaneous source evaporation
(co-deposition), locate the sensors so the evaporant from each source is
flowing to only one sensor. It is not generally possible to do this without special
shielding or optional material directors.
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Source