INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 76)

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XTC/3 Operating Manual
3.6.8.6 XTC/3S Sensor Shutter / CrystalSwitch Output
Due to limitations imposed by the fixed I/O functions in XTC/3S, the function of the
Sensor Shutter outputs depends on the Sensor Type setting in the Hardware
sub-screen of the General Parameter display.
If a single head sensor type is chosen, the Sensor Shutter relay contacts are set to
be inactive. The Sensor Shutter relay contacts become active (opening the shutter)
when entering the Deposit state, Shutter Delay or Control Delay, or during the
Sample period of the RateWatcher function.
If a multi-position sensor type is chosen, the Sensor Shutter relay now functions as
a CrystalSwitch relay. The Sensor Shutter relay contacts are active upon initiating
a CrystalSwitch. Due to the change in function of the relay output from that of
Sensor Shutter to one of CrystalSwitch, RateWatcher is disabled when XTC/3S is
configured for a multi-position sensor.
In XTC/3M, there are separate sensor shutter and crystal switch options so
RateWatcher and multi-position sensors may coexist.
3.6.9 Start Layer Without Backup Crystal Configuration
The following applies only when a film specifies a multi-position sensor like a
CrystalTwo (PN 750-212-G2 Dual Sensor with PN 779-220-G1 or PN 779-220-G2
XTAL 2 Switch), CrystalSix, Crystal12, Rotary Sensor or Dual Head.
If Start Without Backup is set to the default mode No, a layer cannot be started
unless there are at least two known good crystals present in the multi-position
sensor. One of these will be the current crystal in use, the other will be a known
good backup crystal.
If Start Without Backup is set to Yes, a layer with a multi-position sensor can be
started even if there is only one good crystal.
Additionally, if Start Without Backup is set to Yes and XTC/3 switches to the
backup crystal during the process, it will continue using the backup crystal until the
process is RESET, even if the primary crystal is replaced. This may be
circumvented by manually crystal switching to the primary crystal once the failed
crystal is replaced.