INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 63)

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XTC/3 Operating Manual
3.5 State Descriptions
Table 3-1 State descriptions
STATE CONDITION RELAY CONTACT
STATUS
Source
Shutter
Sensor
Shutter
NOTE: The following are Pre-Deposit states.
Associated parameters are shown in the CONDITION column surrounded by the [ ] left and right
square brackets.
READY XTC/3 will accept a START command.
Rate is displayed and Thickness is
accumulated. Inactive Inactive
CRUCIBLE SWITCH XTC/3 advances to next state when the
Cruc Valid input is low. If IDLE PWR of the
previous layer using this source is not
equal to zero, power is set to zero before
the crucible position changes. [Crucible #,
Source #] Inactive Inactive
RISE 1 Source is rising to Soak Power 1 level.
[Rise Time 1] Inactive Inactive
SOAK 1 Source is being maintained at Soak Power
1 level. [Soak Time 1, Soak Power 1] Inactive Inactive
SOAK HOLD 1 (M only)
(Soak 1 state) Source is being maintained at Soak Power
level [Soak Hold 1 input]. Display indicates
SOAK 1. Inactive Inactive
RISE 2 Source is rising to Soak Power 2 level.
[Rise Time 2] Inactive Inactive
SOAK 2 Source is being maintained at Soak Power
2 level. [Soak Time 2, Soak Power 2] Inactive Inactive
SOAK HOLD 2
(Soak 2 state) Source is being maintained at Soak Power
level [Soak Hold 2 input]. Display indicates
SOAK 2. Inactive Inactive
SHUTTER DEL(AY) Rate is being controlled. If TRANSFER
SENSOR is set to YES, the second sensor
is now in use. Advances to Deposit State
once the Source is in Rate Control within
the greater of 5% or 0.5Å for 5 seconds.
[Delay Option, Shutter Delay ON] Inactive Active