INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 140)

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XTC/3 Operating Manual
5.2.2.4.7 Standard Update Output Type Definition (XTC/3M Only)
Command:
UT <Output Number> < Output Type>|< Output Number = 255> < Output 1
Type > < Output 2 Type > … < Output 20 Type >
Output Number = <Byte> 1-20 (255=All Outputs)
Output Type = <Byte> (0 = Normally open, 1 = Normally closed)
Response:
None (Just header and trailer)
5.2.2.4.8 Standard Update Process Parameters (XTC/3M only)
Command:
UP <Command ID> <Process Number> <Parameter List> [<Parameter Value >]
Command ID = See listing below
Process Number = <Byte> 1-99
Parameter List = Depends on the Command ID (See listing that follows)
Parameter Value = Depends on the Command ID (See listing that follows)
Response:
None (Just header and trailer)
Command ID = 1 "Layer List"
Parameter List = <Number of Layers> <Layer 1> <Layer 2> … <Layer n>
Number of Layers = <2 Bytes> Number of layers in this process
Layer n = Film number the layer is to be programmed with. (1 – 32)
n = Number of Layers
Command ID = 2 "Name"
Parameter List = <Process Name>
Process Name = <String> maximum 15 characters, characters are restricted to
hex 20 - hex 7E inclusive, plus null terminating character.
Command ID = 3 "Specific Layer"
Parameter List = Layer to be updated<2 Bytes>
Parameter Value = Film number for given layer to be programmed
<Byte> (1 – 32)