INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 59)

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XTC/3 Operating Manual
3.3.8 Sensor Information Display
Figure 3-11 Typical Sensor Information display
Inactive choices will be gray.
If non-zero values have been programmed for the S and/or Q parameters, the
accumulated counts can be cleared on this screen.
If a multi-position sensor is in use, it can be switched to the next or rotated through
all its positions by positioning the cursor on Switch Crystal or Rotate Head
and pressing TOGL.
NOTE: Rotate Head is allowed only in Ready or Idle at the end of a process.
Frequency indicates the current resonance or the last good value prior to
a crystal failure.