INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
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XTC/3 Operating Manual
S12. . . . . Input status - returns 9 ASCII bytes in order byte 1 to 9, 1 byte per input.
Each byte has an ASCII value of 0 or 1, corresponding to the input’s
status. 0 = grounded (active), 1 = open or high (inactive).
S13. . . . . Raw frequency - Frequency of crystal being read. xxxxxxx.x Hz
[negative of last good frequency if failed]
S14. . . . . Xtal Fail - Returns ASCII 1 if currently failed crystal, 0 if not.
S15. . . . . Max Power - Returns ASCII 1 if currently outputting maximum power,
0 if not.
S16. . . . . Crystal switching - Returns ASCII 1 if currently crystal switching, 0 if not.
S17. . . . . End of process - Returns ASCII 1 if process has ended, 0 if not.
S18. . . . . STOP - Returns ASCII 1 if process is in STOP.
S19. . . . . DATALOG - Returns the datalog string, refer to
, S19
command
for details. Data is separated by spaces instead of CR/LF.
The last byte returned identifies the End on Time Power or Normal Completion
information as 1 or 0 respectively. Also, when using the S19 command the
Begin Process and End Process messages are not returned.
S20. . . . . Present Configuration Selections - returns 16 ASCII bytes with
a value of 0 or 1.
Data byte order (Non-checksum): 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 <ACK>
Table 5-10 S12 Command Input status
Input #
Byte #
Function
1
Start
2
Stop
3
End
4
Sample Initiate
5
Sample Inhibit
6
Crystal Fail Inhibit
7
Zero Thickness
8
Soak 2 Hold
9
Crucible Valid