INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 124)

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XTC/3 Operating Manual
Response:
<Number of Bytes in Response><General Parameters><Film 1
Parameters>…<Film32 Parameters><Inputs><Outputs><Output Types><Film
1 Name>…<Film 32 Name>
Number of Bytes in Response (2 bytes)
All General parameters (4 bytes per parameter)
All parameters for each film (4 bytes per parameter) (9 or 32 films based on
XTC/3S or XTC/3M)
All input definitions (9) (1 byte per input) (XTC/3M only)
All output definitions (20) (1 byte per output) (XTC/3M only)
All output types (20) (1 byte per output) (XTC/3M only)
All Film Names (null terminated) (32 films) (XTC/3M only)
Command ID = 3 “Lower 50 Processes Information” (XTC/3M only)
Response:
<Number of Bytes in Response><Process One>…<Process 50><Process 1
Name>…<Process 50 Name>
Number of Bytes in Response (2 bytes)
Process 1 – 50 layer list (2 byte length (for the number of layers programmed)
followed by 1 byte for each programmed layer)
Process 1 – 50 Names (null terminated)
Command ID = 4 “Upper 49 Processes Information” (XTC/3M only)
Response:
<Number of Bytes in Response><Process 51>…<Process 99><Process 51
Name>…<Process 99 Name>
Number of Bytes in Response (2 bytes)
Process 51 – 99 layer list (2 byte length (for the number of layers programmed)
followed by 1 byte for each programmed layer)
Process 51 – 99 Names (null terminated)