INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Manual (Page 22)

1 - 6
PN
07
4-
44
6-
P1
J
XTC/3 Operating Manual
1.4 XTC/3 Specifications
1.4.1 Measurement
Measurement Frequency Range . . . 6.0 to 5.0 MHz (fixed)
Frequency Resolution . . . . . . . . . . . ± 0.028 Hz @ 6 MHz
Thickness and Rate
Resolution/Measurement . . . . . . . . . ± 0.034 Å @ tooling/density = 100/1
Fundamental frequency = 6 MHz
Measurement Interval . . . . . . . . . . . 0.25 s
Thickness Accuracy . . . . . . . . . . . . . 0.5% typical, (dependent on process
conditions, especially sensor location,
material stress, temperature and density)
Frequency Accuracy . . . . . . . . . . . . ± 2.5 ppm 0 to 50°C
Measurement Frequency . . . . . . . . . 4 Hz
Measurement Technique . . . . . . . . . ModeLock
User Interface. . . . . . . . . . . . . . . . . . TFT LCD and limited membrane keypad.
All parameters accessible through computer
communications. Multiple message areas for
indication of states and detailed indication of
abnormal and stop conditions.
1.4.2 Screens and Parameters
Navigation . . . . . . . . . . . . . . . . . . . . Menu key to go between screens.
Four cursor keys to go between
parameters on screens.
Structure. . . . . . . . . . . . . . . . . . . . . . Separate screens dedicated to:
1) Operate Data Display
2) Film Parameters
3) Process List (XTC/3M only)
4) General Parameters
5) I/O Map
6) Diagnostics
7) Sensor