INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
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XTC/3 Operating Manual
1 = Selection active, 0 = default state for selection
Also see S22 below.
NOTE: In the default configuration, bits 8 and 9 will return values of 1 whereas the
defaults for these bits was 0 in XTC/2. If it is desired to make the S20
response equal to XTC/2 default response, change the Recorder Range to
100 and the Audio Feedback to Yes, both per
Table 5-11 S20 Command Input status
Byte #
Function
State
# 1
Test Mode
(0 = off, 1 = on)
# 2
Parameter Lock
(0 = off, 1 = on)
# 3
Control Mode
(0 = deposit, 1 = etch)
# 4
Stop On Alarms
(0 = no, 1 = yes)
# 5
Stop on Max Power
(0 = no, 1 = yes)
# 6
# 7
# 8
Recorder Type
(in order:
Byte 6, 7, 8)
000 designates Rate, 100 Å/s full scale (unfiltered)
001 designates Rate, 1000 Å/s full scale (unfiltered)
010 designates Thickness, 100 Å full scale
011 designates, 1000 Å full scale
100 designates Power %
101 designates Rate Deviation (±50 Å/s)
110 designates Rate 100 Å/s full scale - smoothed
111 designates Rate 1000 Å/s full scale - smoothed
# 9
Beep On/Off
(0=on, 1=off)
# 10
Backlight Dim
(0 = no, 1 = yes)
# 11
Start Layer without
backup crystal
(0 = no, 1 = yes)
NOTE: See
for
description
# 12
Input Option
0 = Standard, 1 =Film Select
# 13
Not used, returns 0
# 14
# 15
Sensor Type
(in order: Byte 14, 15)
00 = Single Head(s)
10 = Single CrystalSix on sensor 1
11= Two CrystalSix sensors
# 16
Source Control
Voltage polarity
0 = neg, 1 = pos