INFICON XTC/3 Thin Film Deposition Controller Operating Manual User Manual
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07
4-
44
6-
P1
J
XTC/3 Operating Manual
6
(0x06)
1
Sensor 1 Type
0 = Single
1 = CrystalTwo
2 = CrystalSix
3 = Crystal12
4 = Rotary
5 = Dual Head
Int
0
5
7
(0x07)
1
Sensor 2 Type
0 = Single
1 = CrystalTwo
2 = CrystalSix
3 = Crystal12
4 = Rotary
(On Query only:
5 = Dual Head)
Int
0
4
(5 for
Query
comm-
and)
8
(0x08)
1
Source
Control Voltage
0 = 0 to +10
1 = 0 to -10
2 = 0 to +5
3 = 0 to -5
4 = 0 to +2.5
5 = 0 to -2.5
Int
0
5
9
(0x09)
Recorder Mode
0 = Rate
1 = Thickness
2 = Power
3 = Rate Deviation
Int
0
3
10
(0x0a)
Recorder Range
0 = 100
1 = 1000
Int
0
1
11
(0x0b)
Recorder Filter
1 = Smooth
0 = Unfiltered
Int
0
1
12 (0x0c)
Audio Feedback
1 = Yes, 0 = No
Int
0
1
13 (0x0d)
Dim LCD
Minutes
Int
0
99
14
(0x0e)
RS232 Baud Rate
0 = 9600
1 = 19200
2 = 38400
3 = 57600
4 = 115200
Int
0
4
Table 5-3 Standard general parameters (continued)
UG
(0x5547)
Command
ID
Name
Units / Allowed
Values / Notes
Data
Type /
Format
Low
Limit
High
Limit