INFICON Cygnus 2 Thin Film Deposition Controller - Manual (Page 107)

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Cygnus 2 Operating Manual
QUALITY COUNTS . . . . . . . . . . . . . 0 to 99
This sets the number of measurements that must be outside the allowed
Quality Percent before the crystal is declared failed. If the rate deviation relative
to the 2.5 sec average rate is greater than the programmed Quality Percent
limit, the Counts value is incremented. If the rate deviation is less than the
programmed Quality Percent, the Counts value is decremented. Counts are not
allowed to have negative values. If Counts exceeds the value programmed, the
Cygnus 2 will automatically crystal switch, complete the process on
TIME-POWER, POST DEP, or STOP the process. The rate deviation is
computed on each individual rate measurement during the deposit phase, that
is, every 100 ms. Upon entering Deposit, the Quality Count is delayed by five
seconds. The Q Count on the Sensor Information screen will show DLY (delay)
when in pre-deposit, and during the delay period at the beginning of Deposit.
The default value is 0, which disables the function.
NOTE: After a crystal fails due to exceeding the Counts value, the Crystal Fail
can be cleared by installing a new crystal or pressing the F3 key to
Clear S & Q counts on the Sensor Information screen. This action must
be repeated for each Sensor used by cursoring to the appropriate
Sensor number.
STABILITY SINGLE. . . . . . . . . . . . . 0 Hz and 25 to 9999 Hz (Values 1 to 24 are
not allowed)
This sets the maximum permissible increase in frequency from one
measurement to the next that will cause a crystal fail. The default value is 0 Hz
which disables the function.
STABILITY TOTAL . . . . . . . . . . . . . 0 Hz and 25 to 9999 Hz (Values 1 to 24 are
not allowed)
This sets the maximum total permissible increase in frequency accumulated
during the active Material that will cause a crystal fail. The default value is 0 Hz
which disables the function.
NOTE: After a crystal fails due to exceeding the allowable Hz value, the
Crystal Fail can be cleared by installing a new crystal or pressing the
F3 key to Clear S & Q counts on the Sensor Information screen. This
action must be repeated for each Sensor used by cursoring to the
appropriate Sensor number.